WBP2-3

Deposition Conditions of YBa2Cu3O7-δ Superconducting Thin Films Fabricated by the Reel-to-reel PLD Method

13:15-14:45 Dec.4

*Jeongtae Kim, Hongsoo Ha, Gwantae Kim, Insung Park
Korea Electrotechnology Research Institute
Abstract Body

Various thin film deposition methods such as RCE-DR, MOD, MOCVD, and PLD have been used to fabricate second-generation high-temperature superconducting (2G HTS) tapes. Especially, 2GHTS tapes fabricated by the pulsed laser deposition process show excellent electrical current conduction properties under high magnetic field and have recently become a popular research field worldwide.

We focused on identifying the optimal conditions for the continuous deposition of YBa2Cu3O7-δ(YBCO) superconducting layers using the reel-to-reel PLD method on the bi-axially textured substrates made by Ion Beam Assisted Deposition (IBAD) process. Key parameters such as substrate heating temperature, oxygen partial pressure, and pulsed laser settings in a vacuum were examined to determine their impact on the quality of the HTS tapes.

The fabricated tapes were characterized for biaxial alignment using XRD, assessing the 2-theta, in-plane and out-of-plane texture. Additionally, surface and cross-sectional analyses were conducted using SEM, and critical current measurements were performed using the Hall-Ic measurement system.